User Contributed MET/CAL PROCEDURE ============================================================================= INSTRUMENT: Keithley 2000 Customer Verify DATE: 19-Feb-95 AUTHOR: User Contributed REVISION: 1.0 ADJUSTMENT THRESHOLD: 70% NUMBER OF TESTS: 44 NUMBER OF LINES: 420 CONFIGURATION: Fluke 5700A CONFIGURATION: Fluke 5725A ============================================================================= STEP FSC RANGE NOMINAL TOLERANCE MOD1 MOD2 3 4 CON # Keithley Instruments, Inc., does not and cannot warrant the performance or # results that may be obtained by using this program. The entire risk as to # the results and performance of this program is assumed by you. # # Neither Keithely Instruments, Inc., nor any of its employees shall be liable # for any direct, indirect, special, incidental or consequential damages # arising out of the use of its instruments or software even if Keithley # Instruments, inc., has been advised in advance of the possibility of such # damages. Such excluded damages shall include, but are not limited to: costs # of removal and installation, losses sustained as the result of injury to # any person, or damage to property. 1.001 ASK- R A W 1.002 HEAD Welcome to the Keithley 2000 Verification Procedure 1.003 DISP The following equipment is required for this procedure: 1.003 DISP [32] ù Fluke 5700A Calibrator and 5725A Amplifier 1.003 DISP [32] ù Keithley Model 8610 Calibration Short 1.003 DISP [32] ù Cabling to connect the 5700 Calibrator outputs to 1.003 DISP [32] the corresponding 2000 inputs, and to connect the 1.003 DISP [32] 5700's Wide Band output to the 2000's inputs. 1.004 DISP Make sure the 2000 is connected to the GPIB bus, its 1.004 DISP address is set to 16, and it has been turned on and 1.004 DISP allowed to warm-up for at least 1 hour. 1.004 DISP 1.004 DISP Set the Inputs Selector switch for FRONT inputs. 1.005 DISP Install the Calibration Short in the 2000's REAR inputs, 1.005 DISP and make these 5700-to-2000 (FRONT inputs) connections: 1.005 DISP [32] ù Output HI to Input HI ù Sense HI to Sense HI 1.005 DISP [32] ù Output LO to Input LO ù Sense LO to Sense LO 1.005 DISP [32] ù Aux Current Output to AMPS Input # Make sure the 2000 FRONT inputs are selected 1.006 MATH MEM=3 1.007 MATH M[1]=1 1.008 CALL KI Utilities 1.009 MATH MEM=1 1.010 MATH MEM1=30 1.011 MEM2 =30 second Thermal Equilibrium Delay... 1.012 CALL KI Utilities # Initialize 2000 to known state 1.013 IEEE [@116]:SYST:PRES 1.014 IEEE :FORM:ELEM READ 1.015 IEEE *SAV 0 1.016 IEEE :SYST:POS SAV0 1.017 IEEE :TRIG:DELAY 0 # Ohms Verification Steps 1.018 HEAD Verifying 100ê Range 1.019 IEEE :SENS:FUNC "FRES" 1.020 IEEE :SENS:FRES:RANG 100 1.021 5700 0Z S 4W 1.022 IEEE [D1000] :SENS:FRES:AVER:STAT ON 1.023 IEEE [D1000] :SENS:FRES:REF:ACQ; STAT ON 1.024 5700 100Z S 4W 1.025 IEEE [D5000]:FETCH?[I] 1.026 MEME 1.027 MEMC 100 Z 100P% 40P/ 2.001 HEAD Verifying 1kê Range 2.002 IEEE :SENS:FRES:RANG 1000 2.003 5700 1000Z S 4W 2.004 IEEE [D5000]:FETCH?[I] 2.005 MEME 2.006 MEMC 1000 Z 100P% 10P/ 3.001 HEAD Verifying 10kê Range 3.002 IEEE :SENS:FRES:RANG 10e3 3.003 5700 10000Z S 4W 3.004 IEEE [D5000]:FETCH?[I] 3.005 MEME 3.006 MEMC 10000 Z 100P% 10P/ 4.001 HEAD Verifying 100kê Range 4.002 IEEE :SENS:FRES:RANG 100e3 4.003 5700 100000Z S 4W 4.004 IEEE [D5000]:FETCH?[I] 4.005 MEME 4.006 MEMC 1e5 Z 100P% 10P/ 5.001 HEAD Verifying 1Mê Range 5.002 IEEE :SENS:FRES:RANG 1e6 5.003 5700 1e6Z S 4W 5.004 IEEE [D9000]:FETCH?[I] 5.005 MEME 5.006 MEMC 1e6 Z 100P% 10P/ # Switch to 2-wire ohms 6.001 HEAD Verifying 10Mê Range 6.002 IEEE :SENS:FUNC "RES" 6.002 IEEE :SENS:RES:RANG 10e6 6.003 5700 1.0e7Z S 2W 6.004 IEEE [D1000] :SENS:RES:AVER:STAT ON 6.005 IEEE [D10000]:FETCH?[I] 6.006 MEME 6.007 MEMC 1.0e7 Z 400P% 10P/ 7.001 HEAD Verifying 100Mê Range 7.002 IEEE :SENS:RES:RANG 100e6 7.003 5700 1.00e8Z S 2W 7.004 IEEE [D10000]:FETCH?[I] 7.005 MEME 7.006 MEMC 100e6 Z 1500P% 30P/ # DCV Verification Steps 8.001 HEAD Verifying 100mV DC Range 8.002 IEEE :SENS:FUNC "VOLT:DC" 8.003 IEEE :SENS:VOLT:DC:RANG .1 8.004 5700 0V S 2W 8.005 IEEE [D1000] :SENS:VOLT:DC:AVER:STAT ON 8.006 IEEE [D1000] :SENS:VOLT:DC:REF:ACQ; STAT ON 8.007 5700 -0.1V S 2W 8.008 IEEE [D5000]:FETCH?[I] 8.009 MEME 8.010 MEMC 0.1 V 50P% 35P/ 9.001 5700 0.05V S 2W 9.002 IEEE [D5000]:FETCH?[I] 9.003 MEME 9.004 MEMC 0.1 V 50P% 35P/ 10.001 5700 0.1V S 2W 10.002 IEEE [D5000]:FETCH?[I] 10.003 MEME 10.004 MEMC 0.1 V 50P% 35P/ 11.001 HEAD Verifying 1V DC Range 11.002 IEEE :SENS:VOLT:DC:RANG 1 11.003 5700 -1V S 2W 11.004 IEEE [D5000]:FETCH?[I] 11.005 MEME 11.006 MEMC 1 V 30P% 7P/ 12.001 5700 1V S 2W 12.002 IEEE [D5000]:FETCH?[I] 12.003 MEME 12.004 MEMC 1 V 30P% 7P/ 13.001 HEAD Verifying 10V DC Range 13.002 IEEE :SENS:VOLT:DC:RANG 10 13.003 5700 -10V S 2W 13.004 IEEE [D2000]:FETCH?[I] 13.005 MEME 13.006 MEMC 10 V 30P% 5P/ 14.001 5700 5V S 2W 14.002 IEEE [D2000]:FETCH?[I] 14.003 MEME 14.004 MEMC 10 V 30P% 5/ 15.001 5700 10V S 2W 15.002 IEEE [D2000]:FETCH?[I] 15.003 MEME 15.004 MEMC 10 V 30P% 5/ 16.001 MEM2 =Verifying 100V DC Range: 16.002 MEM2 =[MEM2][27][91]1m[27][91]5m >HIGH VOLTAGE PRESENT< 16.003 HEAD [MEM2] 16.004 IEEE :SENS:VOLT:DC:RANG 100 16.005 5700 -100V S 2W 16.006 IEEE [D2000]:FETCH?[I] 16.007 MEME 16.008 MEMC 100 V 45P% 6P/ 17.001 5700 100V S 2W 17.002 IEEE [D2000]:FETCH?[I] 17.003 MEME 17.004 MEMC 100 V 45P% 6P/ 18.001 MEM2 =Verifying 1000V DC Range: 18.002 MEM2 =[MEM2][27][91]1m[27][91]5m >HIGH VOLTAGE PRESENT< 18.003 HEAD [MEM2] 18.004 IEEE :SENS:VOLT:DC:RANG 1000 18.005 5700 -1000V S 2W 18.006 IEEE [D2000]:FETCH?[I] 18.007 MEME 18.008 MEMC 1000 V 45P% 6P/ 19.001 5700 1000V S 2W 19.002 IEEE [D2000]:FETCH?[I] 19.003 MEME 19.004 MEMC 1000 V 45P% 6P/ # ACV Verification Steps 20.001 HEAD Verifying 100mV AC Range 20.002 IEEE :SENS:FUNC "VOLT:AC" 20.003 IEEE :SENS:VOLT:AC:RANG .1 20.004 5700 0.01V 1KH O S 2W 20.005 IEEE [D5000]:FETCH?[I] 20.006 MEME 20.007 MEMC 0.1 V 0.06% 0.03/ 1KH 21.001 5700 0.1V 10H S 2W 21.002 IEEE :SENS:VOLT:AC:AVER:STAT OFF; :SENS:VOLT:AC:DET:BAND MIN 21.003 IEEE [D5000]:FETCH?[I] 21.004 MEME 21.005 MEMC 0.1 V 0.06% 0.03/ 10H 22.001 5700 0.1V 50KH S 2W 22.002 IEEE :SENS:VOLT:AC:DET:BAND MAX 22.003 IEEE :SENS:VOLT:AC:NPLC 1; AVER:STAT ON 22.004 IEEE [D2000]:FETCH?[I] 22.005 MEME 22.006 MEMC 0.1 V 0.12% 0.05/ 50KH 23.001 HEAD Verifying 1V AC Range 23.002 IEEE :SENS:VOLT:AC:RANG 1 23.003 5700 1V 100KH S 2W 23.004 IEEE [D2000]:FETCH?[I] 23.005 MEME 23.006 MEMC 1 V 0.6% 0.08/ 100KH 24.001 HEAD Verifying 10V AC Range 24.002 IEEE :SENS:VOLT:AC:RANG 10 24.003 5700 10V 50KH S 2W 24.004 IEEE [D2000]:FETCH?[I] 24.005 MEME 24.006 MEMC 10 V 0.12% 0.05/ 50KH 25.001 5700 10V 300KH S 2W 25.002 IEEE [D2000]:FETCH?[I] 25.003 MEME 25.004 MEMC 10 V 4% 0.5/ 300KH 26.001 MEM2 =Verifying 100V AC Range: 26.002 MEM2 =[MEM2][27][91]1m[27][91]5m >HIGH VOLTAGE PRESENT< 26.003 HEAD [MEM2] 26.004 IEEE :SENS:FUNC "VOLT:AC" 26.005 IEEE :SENS:VOLT:AC:RANG 100 26.006 5700 100V 200H S 2W 26.007 IEEE :SENS:VOLT:AC:AVER:STAT OFF; :SENS:VOLT:AC:DET:BAND MIN 26.008 IEEE [D10000]:FETCH?[I] 26.009 MEME 26.010 MEMC 100 V 0.06% 0.03/ 200H 27.001 IEEE :SENS:VOLT:AC:DET:BAND MAX 27.002 IEEE :SENS:VOLT:AC:NPLC 1; AVER:STAT ON 27.003 MEM2 =Verifying 750V AC Range: 27.004 MEM2 =[MEM2][27][91]1m[27][91]5m >HIGH VOLTAGE PRESENT< 27.005 HEAD [MEM2] 27.006 IEEE :SENS:VOLT:AC:RANG 750 27.007 5700 740V 20KH B1 S 2W 27.008 IEEE [D2000]:FETCH?[I] 27.009 MEME 27.010 MEMC 750 V 0.06% 0.03/ 20KH # DC Current verification steps: Use the 5700's AUX output for all DCA steps 28.001 HEAD DC Current Verification 28.002 IEEE [@116]:SENS:FUNC "CURR:DC" 28.003 IEEE :SENS:CURR:DC:AVER:STAT ON 28.004 MMFC C2 # 10 mA range 28.005 HEAD Verifying 10mA DC Range... 28.006 IEEE :SENS:CURR:DC:RANG 10E-3 28.007 5700 0A S 2W 28.008 IEEE [D2000]:FETCH?[I] 28.009 MEME 28.010 MEMC 10e-3 A 500P% 40P/ 29.001 5700 0.01A S 2W 29.002 IEEE [D2000]:FETCH?[I] 29.003 MEME 29.004 MEMC 10e-3 A 500P% 40P/ # 100 mA range 30.001 HEAD Verifying 100mA DC Range... 30.002 IEEE :SENS:CURR:DC:RANG 100E-3 30.003 5700 0A S 2W 30.004 IEEE [D2000]:FETCH?[I] 30.005 MEME 30.006 MEMC 0.1 A 500P% 400P/ 31.001 5700 0.1A S 2W 31.002 IEEE [D2000]:FETCH?[I] 31.003 MEME 31.004 MEMC 0.1 A 500P% 400P/ 32.001 5700 -0.1A S 2W 32.002 IEEE [D2000]:FETCH?[I] 32.003 MEME 32.004 MEMC 0.1 A 500P% 400P/ # 1 A range 33.001 HEAD Verifying 1A DC Range... 33.002 IEEE :SENS:CURR:DC:RANG 1 33.003 5700 -1A S 2W 33.004 IEEE [D2000]:FETCH?[I] 33.005 MEME 33.006 MEMC 1 A 800P% 40P/ # 3 A range 34.001 HEAD Verifying 3A DC Range... 34.002 IEEE :SENS:CURR:DC:RANG 3 34.003 5700 3A B1 S 2W 34.004 IEEE [D2000]:FETCH?[I] 34.005 MEME 34.006 MEMC 3 A 1200P% 15P/ # AC Current verification steps: Use the 5700's AUX output for all ACA steps 35.001 HEAD AC Current Verification 35.002 IEEE [@116]:SENS:FUNC "CURR:AC" 35.003 IEEE :SENS:CURR:AC:AVER:STAT OFF 35.004 IEEE :SENS:CURR:AC:DET:BAND MIN 35.005 MMFC C2 # 1 A range 35.006 HEAD Verifying 1A AC Range... 35.007 IEEE :SENS:CURR:AC:RANG 1 35.008 5700 1A 1KH S 2W 35.009 IEEE [D10000]:FETCH?[I] 35.010 MEME 35.011 MEMC 1 A 0.1% 0.04/ 1KH # 3 A range 36.001 HEAD Verifying 3A AC Range... 36.002 IEEE :SENS:CURR:AC:RANG 3 36.003 5700 3A 5KH B1 S 2W 36.004 IEEE [D5000]:FETCH?[I] 36.005 MEME 36.006 MEMC 3 A 0.15% 0.06/ 5KH # Move current output back to NORMAL terminals 37.001 MMFC C1 # Perform zero verification steps and noise test using short in REAR inputs. 37.002 IEEE [@116]:SENS:FUNC "VOLT:DC" 37.003 IEEE :SENS:VOLT:DC:REF:STAT OFF # Make sure the 2000 REAR inputs are selected. 37.004 MATH MEM=3 37.005 MATH M[1]=0 37.006 CALL KI Utilities # 100mV DC Range Zero Step 37.007 IEEE :SENS:VOLT:DC:RANG .1 37.008 IEEE [D5000]:FETCH?[I] 37.009 MEME 37.010 MEME 0 37.011 MEMC 0.1 V 50P% 35P/ # 1V DC Range Zero Step 38.001 IEEE :SENS:VOLT:DC:RANG 1 38.002 IEEE [D5000]:FETCH?[I] 38.003 MEME 38.004 MEME 0 38.005 MEMC 1 V 30P% 7P/ # Noise Test: Less than 4æV noise during M[3] readings # M[1] = minimum reading M[2] = maximum reading # M[3] = number of readings to take during noise test 39.001 HEAD Noise Test # Initialize registers 39.002 MATH M[3]=500 39.003 IEEE :FETCH?[I] 39.004 MATH M[1]=MEM 39.005 MATH M[2]=MEM # Start reading loop 39.006 IEEE :FETCH?[I] 39.007 MATH M[3]=M[3]-1 39.008 MATH MEM1=M[1]-MEM 39.009 JMPF 39.011 39.010 MATH M[1]=MEM 39.011 MATH MEM1=M[2]-MEM 39.012 JMPT 39.014 39.013 MATH M[2]=MEM 39.014 MATH MEM1=M[3] 39.015 JMPT 39.006 39.016 MATH MEM1=M[2]-M[1] 39.017 MATH MEM=0 39.018 MEMC 2 V 4e-7U # 10V DC Range Zero Step 40.001 IEEE :SENS:VOLT:DC:RANG 10 40.002 IEEE [D5000]:FETCH?[I] 40.003 MEME 40.004 MEME 0 40.005 MEMC 10 V 30P% 5P/ # 100V DC Range Zero Step 41.001 IEEE :SENS:VOLT:DC:RANG 100 41.002 IEEE [D5000]:FETCH?[I] 41.003 MEME 41.004 MEME 0 41.005 MEMC 100 V 45P% 6P/ # Do Ohms Zero Steps 42.001 IEEE [@116]:SENS:FUNC "FRES" 42.002 IEEE :SENS:FRES:REF:STAT OFF # 100ê Range Zero Step 42.003 IEEE :SENS:FRES:RANG 100 42.004 IEEE [D5000]:FETCH?[I] 42.005 MEME 42.006 MEME 0 42.007 MEMC 100 Z 100P% 40P/ # 100kê Range Zero Step 43.001 IEEE :SENS:FRES:RANG 100e3 43.002 IEEE [D5000]:FETCH?[I] 43.003 MEME 43.004 MEME 0 43.005 MEMC 100e3 Z 100P% 10P/ # Reset Calibrator and UUT 44.001 5700 * S 44.002 IEEE [@116]:SYST:PRES 44.003 END